| 10689760 |
Deposition platform for flexible substrates and method of operation thereof |
Jose Manuel DIEGUEZ-CAMPO, Tobias Stolley, Stefan Hein, Florian RIES, Morrison NEIL |
2020-06-23 |
| 9873945 |
Common deposition platform, processing station, and method of operation thereof |
Neil MORRISON, Jose Manuel DIEGUEZ-CAMPO, Tobias Stolley, Stefan Hein, Florian RIES +1 more |
2018-01-23 |
| 9348237 |
Mask carrier, mask handling module and method for adjusting a mask |
Michael Heumüller, Michael König |
2016-05-24 |
| 8733277 |
Mask support, mask assembly, and assembly comprising a mask support and a mask |
Uwe Schussler, Stefan Bangert |
2014-05-27 |
| 8686819 |
Magnetic holding device and method for holding a substrate |
Uwe Schuessler, Stefan Bangert |
2014-04-01 |
