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Method for determining the position of a vehicle |
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Method for determining measured values by means of at least two different measuring methods and use thereof |
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Deposition platform for flexible substrates and method of operation thereof |
Jose Manuel DIEGUEZ-CAMPO, Heike Landgraf, Tobias Stolley, Stefan Hein, Morrison NEIL |
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Vacuum processing system and method for mounting a processing system |
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Common deposition platform, processing station, and method of operation thereof |
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| 9534294 |
Cleaning method for thin-film processing applications and apparatus for use therein |
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| 9333525 |
Substrate spreading device for vacuum processing apparatus, vacuum processing apparatus with substrate spreading device and method for operating same |
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2016-05-10 |
