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System and method to evaporate an OLED layer stack in a vertical orientation |
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Andreas Sauer, Andreas Geiss, Felix Brinckmann |
2010-11-30 |
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2010-07-27 |
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Uwe Schussler, Stefan Bangert |
2009-01-20 |
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2005-02-22 |
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2002-01-01 |
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| 6196154 |
Air lock for introducing substrates to and/or removing them from a treatment chamber |
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| 6132562 |
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2000-10-17 |
| 6123494 |
Process for the loading and unloading of an evacuatable treatment chamber and handling device for carrying out the process |
Gerd Ickes |
2000-09-26 |
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Vacuum treatment system for applying thin layers to substrates such as headlights reflectors |
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1998-12-15 |
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Vacuum coating apparatus |
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1996-07-23 |
