Issued Patents All Time
Showing 1–19 of 19 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5970213 | Apparatus for heating a transparent substrate utilizing an incandescent lamp and a heating disk emitting infrared wavelengths | Bernhard Cord, Karl-Heinz Schuller | 1999-10-19 |
| 5913652 | Conveying apparatus | — | 1999-06-22 |
| 5822842 | Method for masking a disk shaped substrate | — | 1998-10-20 |
| 5803521 | Apparatus for gripping a flat substrate | Stefan Kempf | 1998-09-08 |
| 5611858 | Apparatus for transporting discoidal substrates in a vacuum coating apparatus | — | 1997-03-18 |
| 5538560 | Vacuum coating apparatus | Jurgen Henrich | 1996-07-23 |
| 5503675 | Apparatus for applying a mask to and/or removing it from a substrate | — | 1996-04-02 |
| 5480530 | Mask for covering the margin of a disk-shaped substrate | — | 1996-01-02 |
| 5354380 | Apparatus for the insertion and removal of a mask through the airlock of a vacuum coating apparatus | — | 1994-10-11 |
| 5290417 | Apparatus with axial gas distribution for vacuum coating substrates on a carousel | — | 1994-03-01 |
| 5228968 | Cathode sputtering system with axial gas distribution | — | 1993-07-20 |
| 5205919 | Cathode sputtering apparatus | — | 1993-04-27 |
| 5112467 | Cathode sputtering apparatus | — | 1992-05-12 |
| 5112469 | Apparatus for the inward and outward transfer of a workpiece in a vacuum chamber | Stefan Kempf | 1992-05-12 |
| 4984531 | Device for accepting and holding a workpiece in vacuum coating apparatus | Manfred Schuhmacher | 1991-01-15 |
| 4943363 | Cathode sputtering system | Manfred Schuhmacher | 1990-07-24 |
| 4938858 | Cathode sputtering system | — | 1990-07-03 |
| 4886592 | Apparatus on the carousel principle for coating substrates | Friedrich Anderle, Dan Costescu, Stefan Kempf, Emmerich Manfred NOVAK | 1989-12-12 |
| 4820106 | Apparatus for passing workpieces into and out of a coating chamber through locks | Michael Walde | 1989-04-11 |