Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6302372 | Gate valve | Andreas Sauer, Johannes Kunz, Gerhard Joos | 2001-10-16 |
| 6187158 | Device for coating plate-shaped substrates | Andreas Sauer, Katja Grundmann | 2001-02-13 |
| 5944967 | Dual target cathode assembly with shielding | Hans Kunz, Andreas Sauer, Joachim Szczyrbowski, Dietmar Marquardt | 1999-08-31 |
| 5898127 | Apparatus for shielding against high-frequency electromagnetic radiation | Gotz Teschner, Johannes Kunz, Oldrich Medek | 1999-04-27 |
| 5662784 | Apparatus for applying thin layers to a substrate | Erwin Winter, Andreas Sauer, Dietmar Marquardt | 1997-09-02 |
| 5616226 | Cathode assembly | Hans Kunz, Andreas Sauer, Joachim Szczyrbowski, Dietmar Marquardt | 1997-04-01 |
| 5421978 | Target cooling system with trough | Helmut Schilling, Gerhard Joos | 1995-06-06 |
| 5232572 | Device for the releasable fastening of a target or target base on a cathode mounting | Hans Kunz | 1993-08-03 |
| 4984531 | Device for accepting and holding a workpiece in vacuum coating apparatus | Jaroslav Zejda | 1991-01-15 |
| 4943363 | Cathode sputtering system | Jaroslav Zejda | 1990-07-24 |