Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6511584 | Configuration for coating a substrate by means of a sputtering device | Joachim Szczyrbowski, Gotz Teschner, Anton Zmelty, Jurgen Bruch | 2003-01-28 |
| 5944967 | Dual target cathode assembly with shielding | Hans Kunz, Andreas Sauer, Manfred Schuhmacher, Joachim Szczyrbowski | 1999-08-31 |
| 5683560 | Cathode assembly | Joachim Szczyrbowski | 1997-11-04 |
| 5662784 | Apparatus for applying thin layers to a substrate | Manfred Schuhmacher, Erwin Winter, Andreas Sauer | 1997-09-02 |
| 5616226 | Cathode assembly | Hans Kunz, Andreas Sauer, Manfred Schuhmacher, Joachim Szczyrbowski | 1997-04-01 |