Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12196260 | Treatment machine, drive unit for a treatment machine and use of the treatment machine | Frank Hofmann, Karl-Heinz Schmitt, Stefan Kempf, Andreas Amrhein, Uwe Horlitz | 2025-01-14 |
| 11597998 | Vacuum lock and method for transferring a substrate carrier | Michael Reising, Dieter Scherger | 2023-03-07 |
| 7155115 | Method and device for vacuum sputtering | — | 2006-12-26 |
| 6579424 | Method for the production of substrates, magnetron source and sputter-coating chamber | Gerd Deppich, Karl-Heinz Schuller, Oliver Keitel | 2003-06-17 |
| 5970213 | Apparatus for heating a transparent substrate utilizing an incandescent lamp and a heating disk emitting infrared wavelengths | Karl-Heinz Schuller, Jaroslav Zejda | 1999-10-19 |
| 5292394 | Apparatus for large-area ionic etching | Helmut Rauner | 1994-03-08 |