| 12196260 |
Treatment machine, drive unit for a treatment machine and use of the treatment machine |
Frank Hofmann, Karl-Heinz Schmitt, Stefan Kempf, Andreas Amrhein, Uwe Horlitz |
2025-01-14 |
| 11597998 |
Vacuum lock and method for transferring a substrate carrier |
Michael Reising, Dieter Scherger |
2023-03-07 |
| 7155115 |
Method and device for vacuum sputtering |
— |
2006-12-26 |
| 6579424 |
Method for the production of substrates, magnetron source and sputter-coating chamber |
Gerd Deppich, Karl-Heinz Schuller, Oliver Keitel |
2003-06-17 |
| 5970213 |
Apparatus for heating a transparent substrate utilizing an incandescent lamp and a heating disk emitting infrared wavelengths |
Karl-Heinz Schuller, Jaroslav Zejda |
1999-10-19 |
| 5292394 |
Apparatus for large-area ionic etching |
Helmut Rauner |
1994-03-08 |