Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11597998 | Vacuum lock and method for transferring a substrate carrier | Bernhard Cord, Michael Reising | 2023-03-07 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11597998 | Vacuum lock and method for transferring a substrate carrier | Bernhard Cord, Michael Reising | 2023-03-07 |