| 12209327 |
PVT-method and device for producing single crystals in a safe manner with regard to the process |
Michael Schöler, Lorenz Vogel, Karsten Viehmann |
2025-01-28 |
| 6335054 |
Air lock for introducing substrates to and/or removing them from a treatment chamber |
Helmut Grimm, Jurgen Henrich, Klaus Michael, Gert Rodling, Jürgen Ulrich |
2002-01-01 |
| 6196154 |
Air lock for introducing substrates to and/or removing them from a treatment chamber |
Helmut Grimm, Jurgen Henrich, Klaus Michael, Gert Rodling, Jürgen Ulrich |
2001-03-06 |
| 6132562 |
Method and device for transporting cylindrical substrates to be coated |
Helmut Grimm, Jurgen Henrich, Klaus Michael, Gert Rodling, Jürgen Ulrich |
2000-10-17 |
| 5138232 |
Power supply device for thermionic emitting cathode |
Reiner Schleiff, Vladimir Ibl |
1992-08-11 |