Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7771574 | Sputtering cathode for coating processes | Peter Sauer | 2010-08-10 |
| 6881270 | Electrode arrangement | Thomas Gebele, Jurgen Henrich, Stefan Bangert, Jürgen Honekamp, Elisabeth Budke +1 more | 2005-04-19 |
| 6335054 | Air lock for introducing substrates to and/or removing them from a treatment chamber | Tomas Baumecker, Helmut Grimm, Jurgen Henrich, Klaus Michael, Gert Rodling | 2002-01-01 |
| 6196154 | Air lock for introducing substrates to and/or removing them from a treatment chamber | Tomas Baumecker, Helmut Grimm, Jurgen Henrich, Klaus Michael, Gert Rodling | 2001-03-06 |
| 6132562 | Method and device for transporting cylindrical substrates to be coated | Tomas Baumecker, Helmut Grimm, Jurgen Henrich, Klaus Michael, Gert Rodling | 2000-10-17 |