Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6335054 | Air lock for introducing substrates to and/or removing them from a treatment chamber | Tomas Baumecker, Helmut Grimm, Jurgen Henrich, Gert Rodling, Jürgen Ulrich | 2002-01-01 |
| 6206975 | Vacuum treatment system for application of thin, hard layers | Alfred Rick, Josef Hoffmann | 2001-03-27 |
| 6196154 | Air lock for introducing substrates to and/or removing them from a treatment chamber | Tomas Baumecker, Helmut Grimm, Jurgen Henrich, Gert Rodling, Jürgen Ulrich | 2001-03-06 |
| 6187160 | Apparatus for the coating of substrates in a vacuum chamber | Alfred Rick, Helmut Eberhardt, Jorg Krempel-Hesse | 2001-02-13 |
| 6132562 | Method and device for transporting cylindrical substrates to be coated | Tomas Baumecker, Helmut Grimm, Jurgen Henrich, Gert Rodling, Jürgen Ulrich | 2000-10-17 |
| 5423971 | Arrangement for coating substrates | Manfred Arnold, Guido Blang, Rainer Gegenwart, Michael Scherer, Jochen Ritter +1 more | 1995-06-13 |
| 5292419 | Sputtering unit | Gerhard Moses, Ulrich Patz, Michael Scherer | 1994-03-08 |
| 5108789 | Method for manufacturing disk-shaped recording media | Andreas Petz | 1992-04-28 |
| 5097794 | Apparatus for transporting substrates in a vacuum coating system | Peter Mahler, Rainer Gegenwart, Michael Scherer | 1992-03-24 |
| 4936180 | Apparatus for machining workpieces, particularly flat circular disk-shaped substrates | Andreas Petz | 1990-06-26 |
| 4936329 | Device for cleaning, testing and sorting of workpieces | Andreas Petz | 1990-06-26 |