Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5292419 | Sputtering unit | Klaus Michael, Ulrich Patz, Michael Scherer | 1994-03-08 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5292419 | Sputtering unit | Klaus Michael, Ulrich Patz, Michael Scherer | 1994-03-08 |