Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6554980 | Vacuum treatment apparatus for deposition of thin layers on three-dimensional substrates | Gerd Ickes | 2003-04-29 |
| 5698039 | Process for cleaning a substrate using a barrier discharge | Michael Scherer, Willi Neff, Klaus Pochner | 1997-12-16 |
| 5372693 | Vacuum coating apparatus | Gunter Brauer, Michael Scherer, Joachim Szczyrbowski | 1994-12-13 |
| 5292419 | Sputtering unit | Gerhard Moses, Klaus Michael, Michael Scherer | 1994-03-08 |
| 5275709 | Apparatus for coating substrates, preferably flat, more or less plate-like substrates | Friedrich Anderle | 1994-01-04 |
| 5182003 | Stationary magnetron sputtering cathode for a vacuum coating apparatus | Wolfram Maass | 1993-01-26 |
| 4931169 | Apparatus for coating a substrate with dielectrics | Michael Scherer, Rudolf Latz | 1990-06-05 |
| 4247383 | Cathodic system with target, for vacuum sputtering apparatus for the application of dielectric or nonmagnetic coatings to substrates | Walter Greve, Edgar Kaiser, Dieter Grone | 1981-01-27 |