Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5556520 | Method for controlling a reactive sputtering process | — | 1996-09-17 |
| 5531877 | Microwave-enhanced sputtering configuration | Roland Gesche | 1996-07-02 |
| 5478459 | Plasma sputtering installation with microwave enhancement | — | 1995-12-26 |
| 5417834 | Arrangement for generating a plasma by means of cathode sputtering | — | 1995-05-23 |
| 5397448 | Device for generating a plasma by means of cathode sputtering and microwave-irradiation | Roland Gesche | 1995-03-14 |
| 5244559 | Apparatus for transport and heat treatment of substrates | — | 1993-09-14 |
| 5169509 | Apparatus for the reactive coating of a substrate | Michael Schanz, Michael Scherer, Joachim Szczyrbowski | 1992-12-08 |
| 5167789 | Apparatus for coating a substrate | — | 1992-12-01 |
| 5026471 | Device for coating a substrate | Michael Scherer | 1991-06-25 |
| 5006219 | Microwave cathode sputtering arrangement | Michael Scherer, Michael Geisler, Michael Jung | 1991-04-09 |
| 4954201 | Apparatus for etching substrates with a luminous discharge | Thomas Martens | 1990-09-04 |
| 4931169 | Apparatus for coating a substrate with dielectrics | Michael Scherer, Ulrich Patz | 1990-06-05 |