Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6391112 | Heat-exchanging workholder for a vacuum unit | Michael Scherer | 2002-05-21 |
| 5922182 | Apparatus for coating substrates especially with magnetizable materials | Wolfram Maass, Michael Scherer | 1999-07-13 |
| 5658114 | Modular vacuum system for the treatment of disk-shaped workpieces | — | 1997-08-19 |
| 5558751 | Dual cathode sputter coating apparatus | Wolfgang Stang, Michael Scherer, Roland Gesche | 1996-09-24 |
| 5468362 | Apparatus for treating substrates in a vacuum chamber | Wolfgang Stang | 1995-11-21 |
| 5442841 | Hoisery trimming apparatus | Daniel W. McLeod | 1995-08-22 |
| 5429705 | Apparatus for coating and/or etching substrates in a vacuum chamber | Wolfgang Stang | 1995-07-04 |
| 5376180 | Apparatus for holding disk-shaped substrates in the vacuum chamber of a coating or etching apparatus | — | 1994-12-27 |
| 5350455 | Device for holding disk-shaped substrates in the vacuum chamber of a coating or etching apparatus | — | 1994-09-27 |
| 5133285 | Apparatus for transporting substrates | Herbert Naehring | 1992-07-28 |
| 5097794 | Apparatus for transporting substrates in a vacuum coating system | Klaus Michael, Rainer Gegenwart, Michael Scherer | 1992-03-24 |
| 4892451 | Apparatus for the quasi-continuous treatment of substrates | — | 1990-01-09 |
| 4595483 | Cathode sputtering apparatus with adjacently arranged stations | — | 1986-06-17 |
| 4589369 | Device for holding a substrate | — | 1986-05-20 |
| 4338883 | Vacuum vapor-deposition installation with a vacuum chamber, a vaporizing chamber and an evaporizing chamber | — | 1982-07-13 |