Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5205532 | Pivoting air lock for a treatment chamber | — | 1993-04-27 |
| 5133285 | Apparatus for transporting substrates | Peter Mahler | 1992-07-28 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5205532 | Pivoting air lock for a treatment chamber | — | 1993-04-27 |
| 5133285 | Apparatus for transporting substrates | Peter Mahler | 1992-07-28 |