Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8715471 | Magnetron sputter cathode | Andreas Jischke, Uwe Schussler, Hans Wolf | 2014-05-06 |
| 7972486 | Machine for coating a substrate, and module | Hans Buchberger, Andreas Geiss, Dieter Haas | 2011-07-05 |
| 7959776 | Cooled backing plate for a sputtering target, and sputtering target comprising a plurality of backing plates | Andreas Jischke, Uwe SCHÜßLER, Hans Wolf | 2011-06-14 |
| 7575662 | Method for operating a sputter cathode with a target | Stefan Bangert, Wolfgang BUSCHBECK, Markus Hanika, Karl-Albert KEIM, Michael König +4 more | 2009-08-18 |
| 6207028 | Sputtering device with a cathode with permanent magnet system | Dieter Haas, Wolfgang BUSCHBECK | 2001-03-27 |
| 6187160 | Apparatus for the coating of substrates in a vacuum chamber | Alfred Rick, Helmut Eberhardt, Klaus Michael | 2001-02-13 |
| 6183612 | Sputtering cathode | Rolf Adam, Martin Bahr | 2001-02-06 |
| 6139706 | Sputter cathode | Rolf Adam, Martin Bahr | 2000-10-31 |
| 6077407 | Sputtering cathode based on the magnetron principle | Michael Liehr, Rolf Adam | 2000-06-20 |