Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7972486 | Machine for coating a substrate, and module | Andreas Geiss, Jorg Krempel-Hesse, Dieter Haas | 2011-07-05 |
| 6605312 | Method of producing a thin-film system | Torsten Winkler, Ralf Blüthner, Klaus Goedicke, Michael Junghähnel, Manfred Muller +2 more | 2003-08-12 |
| 6436248 | Thin film disk with barrier layer | Heinz Baur, Ralf Bluethner, Klaus Goedicke, Michael Junghaehnel, Karl-Heinz Lehnert +3 more | 2002-08-20 |