Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10546732 | Sputter deposition source, apparatus for sputter deposition and method of assembling thereof | Stefan Keller, Dieter Haas, Stefan Bangert | 2020-01-28 |
| 9899635 | System for depositing one or more layers on a substrate supported by a carrier and method using the same | Stefan Bangert, Jose Manuel DIEGUEZ-CAMPO, Dieter Haas | 2018-02-20 |
| 7959776 | Cooled backing plate for a sputtering target, and sputtering target comprising a plurality of backing plates | Jorg Krempel-Hesse, Andreas Jischke, Hans Wolf | 2011-06-14 |