Patents per Year
Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 8980071 | Apparatus and method for detecting a state of a deposition apparatus | Guido Mahnke, Bernhard Stock, Ferdinand Füller | 2015-03-17 | $8,353,000 |
| 8083911 | Apparatus for treating a substrate | Tobias Stolley | 2011-12-27 | $8,284,000 |
| 7575662 | Method for operating a sputter cathode with a target | Stefan Bangert, Wolfgang BUSCHBECK, Karl-Albert KEIM, Michael König, Jorg Krempel-Hesse +4 more | 2009-08-18 | $17,494,000 |