Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8980071 | Apparatus and method for detecting a state of a deposition apparatus | Guido Mahnke, Bernhard Stock, Ferdinand Füller | 2015-03-17 |
| 8083911 | Apparatus for treating a substrate | Tobias Stolley | 2011-12-27 |
| 7575662 | Method for operating a sputter cathode with a target | Stefan Bangert, Wolfgang BUSCHBECK, Karl-Albert KEIM, Michael König, Jorg Krempel-Hesse +4 more | 2009-08-18 |