Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8980071 | Apparatus and method for detecting a state of a deposition apparatus | Guido Mahnke, Bernhard Stock, Markus Hanika | 2015-03-17 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8980071 | Apparatus and method for detecting a state of a deposition apparatus | Guido Mahnke, Bernhard Stock, Markus Hanika | 2015-03-17 |