Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11754513 | Absorption imaging apparatus and detector array therefor | Benedikt HOFFMANN | 2023-09-12 |
| 8980071 | Apparatus and method for detecting a state of a deposition apparatus | Bernhard Stock, Markus Hanika, Ferdinand Füller | 2015-03-17 |