Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10689760 | Deposition platform for flexible substrates and method of operation thereof | Jose Manuel DIEGUEZ-CAMPO, Heike Landgraf, Stefan Hein, Florian RIES, Morrison NEIL | 2020-06-23 |
| 9926627 | System and methods for processing a substrate | Uwe Hermanns, Neil MORRISON, Volker Hacker | 2018-03-27 |
| 9873945 | Common deposition platform, processing station, and method of operation thereof | Neil MORRISON, Jose Manuel DIEGUEZ-CAMPO, Heike Landgraf, Stefan Hein, Florian RIES +1 more | 2018-01-23 |
| 9534294 | Cleaning method for thin-film processing applications and apparatus for use therein | Florian RIES, Stefan Hein, Stefan Lorenz, Neil MORRISON | 2017-01-03 |
| 8137510 | Coater with a large-area assembly of rotatable magnetrons | Stefan Bangert, Frank Fuchs, Ralph Lindenberg, Andreas Lopp, Uwe Schussler | 2012-03-20 |
| 8083911 | Apparatus for treating a substrate | Markus Hanika | 2011-12-27 |
| 7837799 | Arrangement for transporting a flat substrate in a vacuum chamber | Stefan Bangert, Frank Fuchs, Uwe Schuessler, Ralph Lindenberg | 2010-11-23 |
| 7575662 | Method for operating a sputter cathode with a target | Stefan Bangert, Wolfgang BUSCHBECK, Markus Hanika, Karl-Albert KEIM, Michael König +4 more | 2009-08-18 |