Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 12209303 | Apparatus for providing a liquefied material, dosage system and method for dosing a liquefied material | Andreas Sauer, Thomas DEPPISCH, Ralf SCHEIDT | 2025-01-28 | |
| 9926627 | System and methods for processing a substrate | Uwe Hermanns, Neil MORRISON, Tobias Stolley | 2018-03-27 | $21,583,000 |
| 8294115 | Linear electron source, evaporator using linear electron source, and applications of electron sources | Guenter Klemm, Hans-Georg Lotz | 2012-10-23 | $4,153,000 |
| 7928411 | Linear electron source, evaporator using linear electron source, and applications of electron sources | Guenter Klemm, Hans-Georg Lotz | 2011-04-19 | $9,957,000 |
| 7550927 | System and method for generating ions and radicals | Michael W. Stowell, Guenter Klemm, Hans-Georg Lotz | 2009-06-23 | $29,166,000 |