Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9926627 | System and methods for processing a substrate | Neil MORRISON, Tobias Stolley, Volker Hacker | 2018-03-27 |
| 9758855 | Closed loop control | Thomas DEPPISCH, Franz-Josef Helle, Manfred Englert | 2017-09-12 |
| 8796933 | Generating plasmas in pulsed power systems | — | 2014-08-05 |