| 11713506 |
Evaporator, deposition arrangement, deposition apparatus and methods of operation thereof |
Stefan Keller, Jose Manuel DIEGUEZ-CAMPO, Stefan Bangert, Byung Sung Kwak |
2023-08-01 |
| 8733277 |
Mask support, mask assembly, and assembly comprising a mask support and a mask |
Heike Landgraf, Stefan Bangert |
2014-05-27 |
| 8715471 |
Magnetron sputter cathode |
Jorg Krempel-Hesse, Andreas Jischke, Hans Wolf |
2014-05-06 |
| 8137510 |
Coater with a large-area assembly of rotatable magnetrons |
Stefan Bangert, Frank Fuchs, Ralph Lindenberg, Andreas Lopp, Tobias Stolley |
2012-03-20 |
| 7479189 |
Coating plant with a charging lock and device therefor |
Stefan Bangert, Jurgen Henrich |
2009-01-20 |
| 7153367 |
Drive mechanism for a vacuum treatment apparatus |
Ralph Lindenberg, Michael König, Stefan Bangert |
2006-12-26 |
