| 10186401 |
Plasma-chemical coating apparatus |
Hans-Dieter Wurczinger |
2019-01-22 |
| 8969200 |
Apparatus and method for integration of through substrate vias |
Jeremiah Hebding, Megha Rao, Colin Albright McDonough, Matthew David Smalley, Douglas D. Coolbaugh +3 more |
2015-03-03 |
| 8697542 |
Method for thin die-to-wafer bonding |
Daniel Pascual, Jeremiah Hebding, Megha Rao, Colin Albright McDonough, Douglas D. Coolbaugh +1 more |
2014-04-15 |
| 6566612 |
Method for direct chip attach by solder bumps and an underfill layer |
Guy Paul Brouillette, David Danovitch, Peter A. Gruber, Carlos J. Sambucetti |
2003-05-20 |
| 6487986 |
Device for the plasma deposition of a polycrystalline diamond |
Lothar Schäfer |
2002-12-03 |
| 6416292 |
Method for transporting at least one vaporous substance through the wall of a vacuum chamber and into the vacuum chamber and a device for executing and utilizing the method |
— |
2002-07-09 |
| 6341418 |
Method for direct chip attach by solder bumps and an underfill layer |
Guy Paul Brouillette, David Danovitch, Peter A. Gruber, Carlos J. Sambucetti |
2002-01-29 |
| 6340630 |
Method for making interconnect for low temperature chip attachment |
Daniel G. Berger, Guy Paul Brouillette, David Danovitch, Peter A. Gruber, Bruce Lee Humphrey +2 more |
2002-01-22 |
| 6242053 |
Process for coating plastic containers or glass containers by means of a PCVD coating process |
Friedrich Anderle, Jurgen Henrich, Wilfried Dicken, Heinrich Grunwald, Klaus Nauenburg +1 more |
2001-06-05 |
| 6194835 |
Device for producing plasma |
— |
2001-02-27 |
| 6191532 |
Arrangement for producing plasma |
— |
2001-02-20 |
| 6175183 |
Device for producing plasma |
— |
2001-01-16 |
| 6161501 |
Device for plasma generation |
— |
2000-12-19 |
| 6127735 |
Interconnect for low temperature chip attachment |
Daniel G. Berger, Guy Paul Brouillette, David Danovitch, Peter A. Gruber, Bruce Lee Humphrey +2 more |
2000-10-03 |
| 6126792 |
Method for the application of a scratch protection layer and an antireflection coating system and apparatus for its execution |
Heinrich Grunwald |
2000-10-03 |
| 6077407 |
Sputtering cathode based on the magnetron principle |
Jorg Krempel-Hesse, Rolf Adam |
2000-06-20 |
| 5900065 |
Apparatus for the plasma-chemical deposition of polycrystalline diamond |
Claus-Peter Klages, Gunter Brauer |
1999-05-04 |
| 5897336 |
Direct chip attach for low alpha emission interconnect system |
Guy Paul Brouillette, David Danovitch, William T. Motsiff, Judith Marie Roldan, Carlos J. Sambucetti +1 more |
1999-04-27 |
| 4794863 |
Motive structure for transporting workpieces |
Stephen M. Gates, Michel G. E. G. Renier, Gary W. Rubloff |
1989-01-03 |
