Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10186401 | Plasma-chemical coating apparatus | Michael Liehr | 2019-01-22 |
| 5318928 | Method for the surface passivation of sensors using an in situ sputter cleaning step prior to passivation film deposition | Rainer Gegenwart, Jochen Ritter, Helmut Stoll, Norbert Weimer | 1994-06-07 |
| 4981566 | Arrangement for measuring the thickness of thin layers | — | 1991-01-01 |