| 11888143 |
Method of manufacturing an anode structure, vacuum deposition system, anode structure, and lithium battery layer stack |
— |
2024-01-30 |
| 11588209 |
Ultra-thin ceramic coating on separator for batteries |
Connie P. Wang, Wen SI, Yin Let SIM, Torsten Dieter, Subramanya P. HERLE +3 more |
2023-02-21 |
| 11058010 |
Evaporation apparatus for depositing material on a flexible substrate and method therefore |
— |
2021-07-06 |
| 10081866 |
Evaporation apparatus with gas supply |
Gerd Hoffmann, Sven Schramm |
2018-09-25 |
| 8157975 |
Sprayed Si- or Si:Al-target with low iron content |
Wolf-Eckart Fritsche |
2012-04-17 |
| 7763535 |
Method for producing a metal backside contact of a semiconductor component, in particular, a solar cell |
Jian-Qiang Liu, Stephan Wieder, Jurgen Henrich, Gerhard Rist |
2010-07-27 |
