Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Arrangement for transporting a flat substrate in a vacuum chamber

Arrangement for transporting a flat substrate in a vacuum chamber

US Patent 7837799 · Granted Nov 23, 2010

Estimated economic value: $4,531,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Evaporation apparatus, vapor deposition apparatus, and evaporation method2025
Material deposition apparatus, method of depositing material on a substrate, and2025
Roller for transporting a flexible substrate, vacuum processing apparatus, and m2024
Temperature-controlled shield, material deposition apparatus and method for depo2024
Material deposition apparatus having at least one heating assembly and method fo2024
Flanged joint and method of fluidly connecting two components2024
Vapor deposition apparatus and method for coating a substrate in a vacuum chambe2023
Mask arrangement for masking a substrate in a processing chamber, apparatus for 2023
Evaporator, deposition arrangement, deposition apparatus and methods of operatio2023
Holding arrangement for supporting a substrate carrier and a mask carrier during2020
Deposition platform for flexible substrates and method of operation thereof2020
Sputter deposition source, apparatus for sputter deposition and method of assemb2020