Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11718904 | Mask arrangement for masking a substrate in a processing chamber, apparatus for depositing a layer on a substrate, and method for aligning a mask arrangement for masking a substrate in a processing chamber | Stefan Bangert, Tommaso Vercesi, Daniele GISLON, Andreas Lopp, Dieter Haas | 2023-08-08 |
| 10837111 | Holding arrangement for supporting a substrate carrier and a mask carrier during layer deposition in a processing chamber, apparatus for depositing a layer on a substrate, and method for aligning a substrate carrier supporting a substrate and a mask carrier | Tommaso Vercesi, Dieter Haas, Stefan Bangert, Daniele GISLON | 2020-11-17 |
| 8282089 | Vacuum transport device with movable guide rail | Andreas Jischke, Dieter Haas | 2012-10-09 |
| 8083912 | Substrate carrier | Thomas Klug | 2011-12-27 |