| 9524896 |
Apparatus and methods for transporting and processing substrates |
Terry Bluck, Kevin Fairbairn, Michael Barnes |
2016-12-20 |
| 9022715 |
Load lock chamber designs for high-throughput processing system |
Alexander S. Polyak, James L'HEUREUX, Susanne Schlaefer, Juergen Henrich, Josef T. Hoog +1 more |
2015-05-05 |
| 8303764 |
Apparatus and methods for transporting and processing substrates |
Terry Bluck, Kevin Fairbairn, Michael Barnes |
2012-11-06 |
| 8293066 |
Apparatus and methods for transporting and processing substrates |
Terry Bluck, Kevin Fairbairn, Michael Barnes |
2012-10-23 |
| 7901539 |
Apparatus and methods for transporting and processing substrates |
Terry Bluck, Kevin Fairbairn, Michael Barnes |
2011-03-08 |
| 7585686 |
Method and apparatus for processing a wafer |
Steven Verhaverbeke, J Kelly Truman, Sasson Somekh |
2009-09-08 |
| 7159599 |
Method and apparatus for processing a wafer |
Steven Verhaverbeke, J Kelly Truman, Sasson Somekh |
2007-01-09 |
| 6712020 |
Toroidal plasma source for plasma processing |
Michael S. Cox, Canfeng Lai, Robert B. Majewski, David Wanamaker, Peter Loewenhardt +2 more |
2004-03-30 |
| 6486444 |
Load-lock with external staging area |
Kevin Fairbairn, Howard Grunes, Kelly Colborne |
2002-11-26 |
| 6418874 |
Toroidal plasma source for plasma processing |
Michael S. Cox, Canfeng Lai, Robert B. Majewski, David Wanamaker, Peter Loewenhardt +2 more |
2002-07-16 |
| 6082950 |
Front end wafer staging with wafer cassette turntables and on-the-fly wafer center finding |
Allen Altwood, Kelly Colborne, Kevin Fairbairn, Hari Ponnekanti, Satish Sundar |
2000-07-04 |
| 5909994 |
Vertical dual loadlock chamber |
Rick Scott Blum, Kevin Fairbairn |
1999-06-08 |
| 5905302 |
Loadlock cassette with wafer support rails |
Satish Sundar |
1999-05-18 |
| 5902088 |
Single loadlock chamber with wafer cooling function |
Kevin Fairbairn, Kelly Colborne |
1999-05-11 |
| 5855681 |
Ultra high throughput wafer vacuum processing system |
Dan Maydan, Sasson Somekh, Ashok Sinha, Kevin Fairbairn, Kelly Colborne +2 more |
1999-01-05 |
| 5838121 |
Dual blade robot |
Kevin Fairbairn, Kelly Colborne, Satish Sundar |
1998-11-17 |
| 5817406 |
Ceramic susceptor with embedded metal electrode and brazing material connection |
David Cheung, Mark Fodor, Ryusuke Ushikoshi, Hideyoshi Tsuruta, Tomoyuki Fujii |
1998-10-06 |
| 5633073 |
Ceramic susceptor with embedded metal electrode and eutectic connection |
David Cheung, Mark Fodor, Harold Mortensen |
1997-05-27 |
