Issued Patents All Time
Showing 25 most recent of 26 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6975497 | Method for reducing particles from an electrostatic chuck and an equipment for manufacturing a semiconductor | Mie Nagao, Masashi Ohno | 2005-12-13 |
| 6617514 | Ceramics joint structure and method of producing the same | Hideyoshi Tsuruta, Tomoyuki Fujii | 2003-09-09 |
| 6432208 | Plasma processing apparatus | Satoru Kawakami, Katsuhiko Iwabuchi, Ryo Kuwajima, Naohito Yamada, Tetsuya Kawajiri | 2002-08-13 |
| 6252758 | Method for reducing particles from an electrostatic chuck and an equipment for manufacturing a semiconductor | Mie Nagao, Masashi Ohno | 2001-06-26 |
| 6225606 | Ceramic heater | Hideyoshi Tsuruta, Kazuaki Yamaguchi | 2001-05-01 |
| 6197246 | Plasma-generating electrode device, an electrode-embedded article, and a method of manufacturing thereof | Yusuke Niori, Koichi Umemoto | 2001-03-06 |
| 6134096 | Electrostatic chuck | Naohito Yamada, Masashi Ohno | 2000-10-17 |
| 6106960 | Joined articles, corrosion-resistant joining materials and process for producing joined articles | Tomoyuki Fujii | 2000-08-22 |
| 6101969 | Plasma-generating electrode device, an electrode-embedded article, and a method of manufacturing thereof | Yusuke Niori, Koichi Umemoto | 2000-08-15 |
| 6057513 | Joint structure of metal member and ceramic member and method of producing the same | Hideyoshi Tsuruta, Tomoyuki Fujii | 2000-05-02 |
| 6020076 | Joined ceramic structures and a process for the production thereof | Tomoyuki Fujii | 2000-02-01 |
| 5995357 | Ceramic member-electric power supply connector coupling structure | Hideyoshi Tsuruta, Tomoyuki Fujii | 1999-11-30 |
| 5946183 | Electrostatic chuck | Naohito Yamada, Masashi Ohno | 1999-08-31 |
| 5817406 | Ceramic susceptor with embedded metal electrode and brazing material connection | David Cheung, Mark Fodor, Christopher T. Lane, Hideyoshi Tsuruta, Tomoyuki Fujii | 1998-10-06 |
| 5800618 | Plasma-generating electrode device, an electrode-embedded article, and a method of manufacturing thereof | Yusuke Niori, Koichi Umemoto | 1998-09-01 |
| 5794838 | Ceramics joined body and method of joining ceramics | Hideyoshi Tsuruta, Tomoyuki Fujii | 1998-08-18 |
| 5767027 | Aluminum nitride sintered body and its production method | Atsushi Sakon, Koichi Umemoto, Hiromichi Kobayashi | 1998-06-16 |
| 5683606 | Ceramic heaters and heating devices using such ceramic heaters | Atsushi Sakon, Koichi Umemoto, Yusuke Niiori | 1997-11-04 |
| 5616024 | Apparatuses for heating semiconductor wafers, ceramic heaters and a process for manufacturing the same, a process for manufacturing ceramic articles | Kazuhiro Nobori, Koichi Umemoto, Atsushi Sakon, Yusuke Niiori, Masahiro Murasato | 1997-04-01 |
| 5573690 | Ceramic articles | Kazuhiro Nobori, Koichi Umemoto, Shinji Yamaguchi | 1996-11-12 |
| 5490228 | Heating units for use in semiconductor-producing apparatuses and production thereof | Takao Soma, Kazuhiro Nobori | 1996-02-06 |
| 5306895 | Corrosion-resistant member for chemical apparatus using halogen series corrosive gas | Kazuhiro Nobori, Yusuke Niori, Koichi Umemoto, Hiromichi Kobayashi, Toshihiko Honda +1 more | 1994-04-26 |
| 5280156 | Wafer heating apparatus and with ceramic substrate and dielectric layer having electrostatic chucking means | Yusuke Niori, Kazuhiro Nobori, Koichi Umemoto | 1994-01-18 |
| 5231690 | Wafer heaters for use in semiconductor-producing apparatus and heating units using such wafer heaters | Takao Soma, Kazuhiro Nobori | 1993-07-27 |
| 5215501 | Hysteresis magnet coupling for roots type pumps | — | 1993-06-01 |