Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6975497 | Method for reducing particles from an electrostatic chuck and an equipment for manufacturing a semiconductor | Ryusuke Ushikoshi, Masashi Ohno | 2005-12-13 |
| 6549392 | Method for reducing particles from an electrostatic chuck and an equipment for manufacturing a semiconductor | Masashi Ohno, Hiromichi Kobayashi | 2003-04-15 |
| 6252758 | Method for reducing particles from an electrostatic chuck and an equipment for manufacturing a semiconductor | Ryusuke Ushikoshi, Masashi Ohno | 2001-06-26 |