Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11456189 | Member for semiconductor manufacturing apparatuses | Kazuma Ohba, Takashi Kataigi | 2022-09-27 |
| 10814436 | Joined body including ceramic member and metallic member and method for manufacturing joined body | Tomoyuki Minami | 2020-10-27 |
| 10332771 | Joined body manufacturing method and joined body | Tomoyuki Minami, Kazuhiro Nobori | 2019-06-25 |
| 10150709 | Joined body manufacturing method | Tomoyuki Minami, Kazuhiro Nobori | 2018-12-11 |
| 10037910 | Wafer holder and method for manufacturing the same | Takuya Yanoh, Kazuma Ohba, Hideyoshi Tsuruta | 2018-07-31 |
| 9126384 | Bonded body of ceramic member and metal member and method for manufacturing the same | Tomoyuki Minami | 2015-09-08 |
| 8136820 | Electrostatic chuck with heater and manufacturing method thereof | Ikuhisa Morioka, Kazuhiro Nobori, Akiyoshi Hattori | 2012-03-20 |
| 8129016 | Substrate supporting member | Yasufumi Aihara, Tomoyuki Fujii | 2012-03-06 |
| 7848075 | Electrostatic chuck with heater | Kazuhiro Nobori, Akiyoshi Hattori | 2010-12-07 |
| 7416793 | Electrostatic chuck and manufacturing method for the same, and alumina sintered member and manufacturing method for the same | Hiroto Matsuda, Kazuhiro Nobori, Yasuyoshi Imai | 2008-08-26 |
| 7353979 | Method of fabricating substrate placing stage | Tomoyuki Fujii, Yasuyoshi Imai | 2008-04-08 |
| 7067200 | Joined bodies and a method of producing the same | Tomoyuki Fujii, Hideyoshi Tsuruta | 2006-06-27 |
| 6728091 | Electrostatic adsorption device | Hideyoshi Tsuruta, Masahito Eguchi, Ikuhisa Morioka | 2004-04-27 |
| 6432208 | Plasma processing apparatus | Satoru Kawakami, Katsuhiko Iwabuchi, Ryo Kuwajima, Ryusuke Ushikoshi, Naohito Yamada | 2002-08-13 |
| 6292346 | Equipment for holding a semiconductor wafer, a method for manufacturing the same, and a method for using the same | Masashi Ohno, Hirokazu Ichikawa, Naohito Yamada | 2001-09-18 |