Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11476147 | Wafer holding table | Kengo Torii | 2022-10-18 |
| 10037910 | Wafer holder and method for manufacturing the same | Kazuma Ohba, Tetsuya Kawajiri, Hideyoshi Tsuruta | 2018-07-31 |