Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11456189 | Member for semiconductor manufacturing apparatuses | Tetsuya Kawajiri, Takashi Kataigi | 2022-09-27 |
| 10037910 | Wafer holder and method for manufacturing the same | Takuya Yanoh, Tetsuya Kawajiri, Hideyoshi Tsuruta | 2018-07-31 |
| 8361271 | Ceramic-metal bonded body and method of producing the same | Yasufumi Aihara, Hiroya SUGIMOTO, Shunsuke Tanaka, Jyunya WAKI | 2013-01-29 |