Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9255747 | Cooling plate, method for manufacturing the same, and member for semiconductor manufacturing apparatus | Asumi Jindo, Katsuhiro Inoue, Yuji Katsuda, Takashi Kataigi, Shingo Amano | 2016-02-09 |
| 9257315 | Cooling plate, method for manufacturing the same, and member for semiconductor manufacturing apparatus | Asumi Jindo, Katsuhiro Inoue, Yuji Katsuda, Takashi Kataigi, Shingo Amano | 2016-02-09 |
| 8361271 | Ceramic-metal bonded body and method of producing the same | Yasufumi Aihara, Shunsuke Tanaka, Kazuma Ohba, Jyunya WAKI | 2013-01-29 |
| 8071913 | Heating device | Masao Nishioka | 2011-12-06 |
| D609655 | Electrostatic chuck | — | 2010-02-09 |
| 7250215 | Aluminum nitride sintered body containing carbon fibers and method of manufacturing the same | Jun Yoshikawa, Naohito Yamada | 2007-07-31 |