Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9892950 | Ceramic member, member for semiconductor manufacturing apparatus, and method for manufacturing ceramic member | Morimichi Watanabe, Yuji Katsuda, Yosuke Sato, Yoshinori Isoda, Atsushi Watanabe | 2018-02-13 |
| 9437463 | Heating device | Nobuyuki Kondo, Morimichi Watanabe, Yuji Katsuda, Yosuke Sato, Yoshinori Isoda | 2016-09-06 |
| 9287144 | Heating device | Nobuyuki Kondo, Morimichi Watanabe, Yuji Katsuda, Yosuke Sato, Yoshinori Isoda | 2016-03-15 |
| 9257315 | Cooling plate, method for manufacturing the same, and member for semiconductor manufacturing apparatus | Katsuhiro Inoue, Yuji Katsuda, Takashi Kataigi, Shingo Amano, Hiroya SUGIMOTO | 2016-02-09 |
| 9255747 | Cooling plate, method for manufacturing the same, and member for semiconductor manufacturing apparatus | Katsuhiro Inoue, Yuji Katsuda, Takashi Kataigi, Shingo Amano, Hiroya SUGIMOTO | 2016-02-09 |
| 9245775 | Heating device | Nobuyuki Kondo, Morimichi Watanabe, Yuji Katsuda, Yosuke Sato, Yoshinori Isoda | 2016-01-26 |
| 9202718 | Electrostatic chuck | Kenichiro AIKAWA, Morimichi Watanabe, Yuji Katsuda, Yosuke Sato, Yoshinori Isoda | 2015-12-01 |
| 9188397 | Dense composite material, method for producing the same, and component for semiconductor production equipment | Katsuhiro Inoue, Yuji Katsuda | 2015-11-17 |
| 9184070 | Dense composite material, method for manufacturing the same, joined body, and member for semiconductor manufacturing apparatuses | Katsuhiro Inoue, Yuji Katsuda | 2015-11-10 |
| 9184081 | Electrostatic chuck | Kenichiro AIKAWA, Morimichi Watanabe, Yuji Katsuda, Yosuke Sato, Yoshinori Isoda | 2015-11-10 |
| 9142439 | Laminated structure, member for semiconductor manufacturing apparatus, and method for producing laminated structure | Katsuhiro Inoue, Yuji Katsuda | 2015-09-22 |
| 8679998 | Corrosion-resistant member for semiconductor manufacturing apparatus and method for manufacturing the same | Morimichi Watanabe, Yuji Katsuda, Toru Hayase | 2014-03-25 |
| 8597776 | Ceramic material, laminate, member for use in semiconductor manufacturing equipment, and sputtering target member | Morimichi Watanabe, Yuji Katsuda, Yosuke Sato, Yoshinori Isoda | 2013-12-03 |
| 8541328 | Ceramic material, member for semiconductor manufacturing equipment, sputtering target member and method for producing ceramic material | Morimichi Watanabe, Yuji Katsuda, Yosuke Sato, Yoshinori Isoda | 2013-09-24 |