Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9394206 | Method for producing electrostatic chuck and electrostatic chuck | Kazuhiro Nobori, Takuji Kimura | 2016-07-19 |
| 7763146 | Disassembly method and reuse method of substrate mounting member | — | 2010-07-27 |
| 6728091 | Electrostatic adsorption device | Hideyoshi Tsuruta, Tetsuya Kawajiri, Ikuhisa Morioka | 2004-04-27 |