Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11610798 | Electrostatic chuck assembly, electrostatic chuck, and focus ring | Tatsuya KUNO, Kenichiro AIKAWA | 2023-03-21 |
| 11282734 | Electrostatic chuck and method for manufacturing the same | Tatsuya KUNO, Takashi Kataigi, Kenichiro AIKAWA | 2022-03-22 |
| 8136820 | Electrostatic chuck with heater and manufacturing method thereof | Kazuhiro Nobori, Tetsuya Kawajiri, Akiyoshi Hattori | 2012-03-20 |
| 7763831 | Heating device | Yasufumi Aihara, Hideyoshi Tsuruta | 2010-07-27 |
| 7576967 | Electrostatic chuck | Yasufumi Aihara, Hideyoshi Tsuruta | 2009-08-18 |
| 6728091 | Electrostatic adsorption device | Hideyoshi Tsuruta, Masahito Eguchi, Tetsuya Kawajiri | 2004-04-27 |