Issued Patents All Time
Showing 25 most recent of 26 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12340990 | Member for semiconductor manufacturing apparatus | Hiroshi Takebayashi, Seiya INOUE | 2025-06-24 |
| 12308220 | Wafer placement table | Seiya INOUE | 2025-05-20 |
| 12284729 | Ceramic heater with shaft | Hiroshi Takebayashi, Kenichiro AIKAWA | 2025-04-22 |
| 12283511 | Member for semiconductor manufacturing apparatus | Masaki Ishikawa, Taro USAMI | 2025-04-22 |
| 12266557 | Wafer placement table | Seiya INOUE | 2025-04-01 |
| 12266515 | Wafer placement table | Seiya INOUE | 2025-04-01 |
| 12237156 | Wafer placement table | Masaki Ishikawa, Seiya INOUE | 2025-02-25 |
| 12230526 | Electrostatic chuck heater | Hiroshi Takebayashi, Kenichiro AIKAWA | 2025-02-18 |
| 12211729 | Member for semiconductor manufacturing apparatus | Natsuki HIRATA, Shinya Yoshida, Seiya INOUE, Taro USAMI, Kenji YONEMOTO +1 more | 2025-01-28 |
| 12211671 | Wafer placement table | Seiya INOUE | 2025-01-28 |
| 12211726 | Member for semiconductor manufacturing apparatus | Seiya INOUE, Natsuki HIRATA, Kenji YONEMOTO | 2025-01-28 |
| 12191123 | Wafer placement table | Hiroshi Takebayashi, Seiya INOUE | 2025-01-07 |
| 12176186 | Wafer placement table | Seiya INOUE | 2024-12-24 |
| 12131891 | Wafer placement table | Seiya INOUE | 2024-10-29 |
| 12106994 | Electrostatic chuck | — | 2024-10-01 |
| 12108499 | Ceramic heater with shaft | Kenichiro AIKAWA, Hiroshi Takebayashi | 2024-10-01 |
| 12087613 | Wafer placement table and method of manufacturing the same | Hiroshi Takebayashi, Kenichiro AIKAWA | 2024-09-10 |
| 12087610 | Member for semiconductor manufacturing apparatus | Seiya INOUE | 2024-09-10 |
| 12087609 | Wafer placement table | Takumi Wakisaka | 2024-09-10 |
| 12040165 | Wafer placement table | Seiya INOUE, Hiroshi Takebayashi | 2024-07-16 |
| 11951583 | Electrostatic chuck with high insulation performance and electrostatic attraction force | Hiroshi Takebayashi, Kenichiro AIKAWA | 2024-04-09 |
| 11948825 | Wafer placement table | Kenichiro AIKAWA, Hiroshi Takebayashi | 2024-04-02 |
| 11610798 | Electrostatic chuck assembly, electrostatic chuck, and focus ring | Ikuhisa Morioka, Kenichiro AIKAWA | 2023-03-21 |
| 11282734 | Electrostatic chuck and method for manufacturing the same | Ikuhisa Morioka, Takashi Kataigi, Kenichiro AIKAWA | 2022-03-22 |
| 10605300 | Powder for thermal spray, thermal spray coating film, coating film and roll in molten metal bath | Noriyuki YASUO, Takeshi Takabatake, Tatsuo Suidzu, Hiroaki Mizuno, Takaya Masuda | 2020-03-31 |