Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12381094 | Substrate processing apparatus and substrate processing method | Naoki Shindo, Hirofumi Yamaguchi | 2025-08-05 |
| 11335567 | Etching method and etching apparatus | Naoki Shindo, Satoshi TODA | 2022-05-17 |
| 7771536 | Substrate processing apparatus | Takahiro Horiguchi | 2010-08-10 |
| 6432208 | Plasma processing apparatus | Satoru Kawakami, Katsuhiko Iwabuchi, Ryusuke Ushikoshi, Naohito Yamada, Tetsuya Kawajiri | 2002-08-13 |