Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12283489 | Etching method and etching apparatus | Naoki Shindo, Mitsuhiro Tachibana, Haruna Suzuki, Gen You | 2025-04-22 |
| 12215417 | Substrate processing method and substrate processing device | Tetsuro Takahashi | 2025-02-04 |
| 11764070 | Etching method and etching apparatus | Naoki Shindo, Haruna Suzuki, Gen You | 2023-09-19 |
| 11335567 | Etching method and etching apparatus | Naoki Shindo, Ryo Kuwajima | 2022-05-17 |
| 11127597 | Etching method | Reiko SASAHARA, Takuya Abe, Tsuhung Huang, Yoshie OZAWA, Ken NAKAGOMI +2 more | 2021-09-21 |
| 10460949 | Substrate processing apparatus, substrate processing method and storage medium | Hiroyuki Takahashi, Kazunori Kazama, Noriyuki Iwabuchi, Tetsuro Takahashi | 2019-10-29 |
| 10256107 | Substrate processing method | Muneyuki Imai | 2019-04-09 |
| 10221109 | Method for producing alpha-olefin low polymer | Hiroki Emoto | 2019-03-05 |
| 9691631 | Etching method and storage medium | Kenshirou Asahi, Hiroyuki Takahashi, Kimihiko DEMICHI | 2017-06-27 |
| 9646848 | Etching method, etching apparatus and storage medium | Kensaku Narushima, Hiroyuki Takahashi | 2017-05-09 |
| 9490151 | Substrate processing apparatus and substrate processing method | Yuji Asakawa, Yohei MIDORIKAWA, Hiroyuki Takahashi | 2016-11-08 |