Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11572623 | Substrate processing apparatus | — | 2023-02-07 |
| 9490151 | Substrate processing apparatus and substrate processing method | Yuji Asakawa, Satoshi TODA, Hiroyuki Takahashi | 2016-11-08 |