Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12040198 | Inner wall and substrate processing apparatus | Atsushi Tanaka, Hiroyuki Ogawa | 2024-07-16 |
| 11424128 | Apparatus and method for etching substrate | Nobuhiro Takahashi | 2022-08-23 |
| 9896357 | Electrodeionization apparatus for producing deionized water | Naho Ikeda, Keisuke Sasaki, Kazuya Hasegawa | 2018-02-20 |
| 9490151 | Substrate processing apparatus and substrate processing method | Yohei MIDORIKAWA, Satoshi TODA, Hiroyuki Takahashi | 2016-11-08 |
| 8871073 | Electrodeionization apparatus for producing deionized water | Kazuya Hasegawa, Keisuke Sasaki | 2014-10-28 |
| 7701236 | Each inspection units of a probe apparatus is provided with an imaging unit to take an image of a wafer | Shuji Akiyama, Tadashi Obikane, Masaru Suzuki, Yasuhito Yamamoto, Kazuya Yano +6 more | 2010-04-20 |
| 7326349 | Method and apparatus for purifying alcoholic liquors | — | 2008-02-05 |
| 6642350 | Method of purifying bishydroxyalkyl terephthalate | Shin Asano | 2003-11-04 |
| 6508939 | Mixed bed type sugar solution refining system and regeneration method for such apparatus | — | 2003-01-21 |
| 6362240 | Mixed-bed type sugar solution refining system and regeneration method for such apparatus | — | 2002-03-26 |