Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8726748 | Probe apparatus and substrate transfer method | Tadashi Obikane, Kazuya Yano, Hiroshi Yamada, Masaru Suzuki | 2014-05-20 |
| 8536891 | Inspection method for inspecting electric characteristics of devices formed on target object | Isamu Inomata | 2013-09-17 |
| 8294480 | Inspection apparatus having alignment mechanism | Masaru Suzuki | 2012-10-23 |
| 8081007 | Inspection apparatus and method for inspecting electric characteristics of devices formed on target object | Isamu Inomata | 2011-12-20 |
| 7859283 | Probe apparatus, probing method, and storage medium | Masaru Suzuki, Junichi Hagihara | 2010-12-28 |
| 7812627 | Test device | Yutaka Akaike, Shinya Kuroda | 2010-10-12 |
| 7724007 | Probe apparatus and probing method | Kazuhiro Ozawa, Fumito Kagami | 2010-05-25 |
| 7701236 | Each inspection units of a probe apparatus is provided with an imaging unit to take an image of a wafer | Shuji Akiyama, Tadashi Obikane, Masaru Suzuki, Kazuya Yano, Yuji Asakawa +6 more | 2010-04-20 |