Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9684014 | Prober for inspecting semiconductor devices formed on semiconductor wafer | Shuji Akiyama, Kazuya Yano | 2017-06-20 |
| 9261553 | Probe apparatus | Eiichi Shinohara, Munetoshi Nagasaka, Kazuya Yano, Yoshiyasu Kato | 2016-02-16 |
| 8536891 | Inspection method for inspecting electric characteristics of devices formed on target object | Yasuhito Yamamoto | 2013-09-17 |
| 8081007 | Inspection apparatus and method for inspecting electric characteristics of devices formed on target object | Yasuhito Yamamoto | 2011-12-20 |
| 7688096 | Contact load measuring apparatus and inspecting apparatus | — | 2010-03-30 |
| 6433566 | Probing method and probing system | Isao Kono | 2002-08-13 |