Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12106997 | Test device, change kit, and method of exchanging change kit | Hiroki Hosaka, Hiroshi Amemiya, Tadashi Obikane | 2024-10-01 |
| 11894256 | Substrate holding mechanism, substrate mounting method, and substrate detaching method | Toshiaki Takahara | 2024-02-06 |
| 8098412 | Method for detecting the center of wafer and storage medium storing a program for executing the method | — | 2012-01-17 |
| 7724007 | Probe apparatus and probing method | Yasuhito Yamamoto, Kazuhiro Ozawa | 2010-05-25 |
| 7701236 | Each inspection units of a probe apparatus is provided with an imaging unit to take an image of a wafer | Shuji Akiyama, Tadashi Obikane, Masaru Suzuki, Yasuhito Yamamoto, Kazuya Yano +6 more | 2010-04-20 |
| 7583099 | Method for re-registering an object to be aligned by re-capturing images using previously registered conditions and storage medium storing a program for executing the method | — | 2009-09-01 |
| 5264918 | Method and device for detecting the center of a wafer | — | 1993-11-23 |