Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11776829 | Dummy wafer | Shigeru Kasai, Yoshiyasu Kato, Hiroyuki Nakayama, Hiroaki KOMIYA | 2023-10-03 |
| 11590672 | Sheet punching apparatus | — | 2023-02-28 |
| 11543445 | Inspection apparatus | Shigeru Kasai, Hiroyuki Nakayama, Yoshinori Fujisawa | 2023-01-03 |
| 11226366 | Wafer inspection device and maintenance method for same | Takeo Saito | 2022-01-18 |
| 10307929 | Punching apparatus | — | 2019-06-04 |
| 9885747 | Substrate inspection apparatus and substrate temperature control method | Dai Kobayashi | 2018-02-06 |
| 8082977 | Ceramic mounting for wafer apparatus with thermal expansion feature | Munetoshi Nagasaka | 2011-12-27 |
| 7994809 | Transfer mechanism for target object to be inspected | Hiroshi Yamada, Tomoya Endo | 2011-08-09 |
| 7812627 | Test device | Yasuhito Yamamoto, Shinya Kuroda | 2010-10-12 |
| 7580109 | Substrate supporting unit, and substrate temperature control apparatus and method | — | 2009-08-25 |
| 7525695 | Image reading apparatus | — | 2009-04-28 |
| 6634245 | Drivingly rotatable mechanism of specimen loading table and specimen loading mechanism | Haruhiko Yoshioka, Shinji Iino, Masaru Suzuki | 2003-10-21 |
| 6317647 | Aligner | Isao Kono, Satoshi Sano | 2001-11-13 |
| 6307390 | Aligner and method for inspecting semiconductor wafer using shell | Isao Kono, Satoshi Sano | 2001-10-23 |
| 6262570 | Probe apparatus | Chiaki Mochizuki, Isao Kono, Haruhiko Yoshioka | 2001-07-17 |
| 5912555 | Probe apparatus | Chiaki Mochizuki, Isao Kono, Haruhiko Yoshioka | 1999-06-15 |